A CAD investigation of metal-overhang on multiple guard ring design for high voltage operation of Si sensors

Abstract

The extension of Si detectors to the next generation high-energy physics experiments such as large hadron collider implies a reliable operation in high radiation environment which is by far the main technological challenge for these detectors. Multiple field limiting ring systems are well established as a means of protecting diffused junction from high voltage premature breakdown. Also, a spread of the Al metallization over the inter-cathodic field oxide sensibly lowers the electric field at the junction edges, thus, allowing for higher breakdown voltages. The purpose of this work is to combine the positive aspects of these two termination techniques with the aim of defining layouts and technological solutions suitable for the use of Si detectors in adverse radiation environment. An important feature is the potential distribution in the multi-guard ring structure, which depends on the bulk doping concentration, the oxide charge, the size of the gap between guard rings and the metal-overhang design. A systematic investigation on the breakdown performance is done by varying the physical and geometrical parameters such as width of overhang, guard ring spacing, junction depth and oxide charge. CAD tools are used for evaluating potential and electric field distributions within the device.