A biodynamic microsystem for fluids viscosity measurements

Abstract

The purpose of this research was to model, design and fabricate a biodynamic analysis microsystem required for determination of various molecular transport properties of the biological fluids. In order to achieve this, a lab-on-a-chip device was fabricated. The microfluidic system developed satisfies the objectives for the study of microcirculation and characterization of cell rheological properties, functions and behaviour. The measurement principle of the viscosity of biological fluids is based on the detection of the rotation of a polysilicon gear-wheels system. The gear-wheels have external diameters of 250 µm, 200 µm, 160 µm and 3 µm thickness. The micromachining process combines the undercut and refill technique with pin-joint bearing permitting the fabrication of bushings that were used to elevate the rotor away from the silicon surface. The testing of the microfluidic dynamic system was performed using electromagnetic micropumps and magnetic controllers. Each device was fabricated by silicon micromachining technology and tested to obtain the specific characteristics.