Abstract
A beam-profile monitor has been constructed based on a two-dimensional cross-connected-pixels anode and a 128-channel picoammeter system. It can provide the total beam current, as well as the current projections in the x- and y-directions with a spatial resolution of ∼1 mm. It is suitable for diagnosis of low-energy charged-particle beams ranging from subpicoamperes to nanoamperes, e.g., the ion beams extracted from an electron beam ion source.
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