Abstract
A novel MEMS wireless millimeter-wave power sensor based on GaAs MMIC technology is presented in this paper. The principle of this wireless millimeter-wave power sensor is explained. It is designed and fabricated using MEMS technology and the GaAs MMIC process. With the millimeter-wave power range from 0.1 to 80 mW, the sensitivity of the wireless millimeter-wave power sensor is about 0.246 mV mW−1 at 35 GHz. In order to verify the power detection capability, this wireless power sensor is mounted on a PCB which influences the microwave performance of the CPW-fed antenna including the return loss and the radiation pattern. The frequency-dependent characteristic and the degree-dependent characteristic of this wireless power sensor are researched. Furthermore, in addition to the combination of the advantages of CPW-fed antenna with the advantages of the thermoelectric power sensor, another significant advantage of this wireless millimeter-wave power sensor is that it can be integrated with MMICs and other planar connecting circuit structures with zero dc power consumption. These features make it suitable for various applications ranging from the environment or space radiation detection systems to radar receiver and transmitter systems.
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