A 3-D Device-Level Investigation of a Lag-Free PPD Pixel With a Capacitive Deep Trench Isolation as Shared Vertical Transfer Gate

Abstract

The application of capacitive deep trench isolation (CDTI) as a shared vertical transfer gate (VTG) in a back-side-illuminated CMOS image sensor pixel is investigated using 3-D device-level simulations. The parasitic capacitance existence between CDTI and deeply buried pinned photodiode (BPD), and also between CDTI and floating diffusion (FD) region, makes the charge transfer process more difficult. In order to design a lag-free pixel and obtain complete charge transfer from BPD to FD, various considerations regarding the device-level design should be taken into account which is discussed in this paper. A CDTI neighboring two pixels can be functionalized as a shared VTG. Using CDTI as shared VTG facilitates pixel miniaturization and can result in more circuit integration at the pixel surface. This paper proposes a ${2}\,\,\mu \text{m} \times {2}\,\,\mu \text{m}$ pixel with CDTI as shared VTG, an equilibrium full-well capacity of 4605 e−, and a complete charge transfer from BPD to FD.