Abstract
We report on the simultaneous definition and fabrication of Bragg gratings and ridge waveguides using wafer stepper lithography and reactive ion etching, respectively. Single-longitudinal mode emission from two-section ridge-waveguide distributed feedback lasers with sixth and seventh order gratings will be reported. This technology enables a cheap fabrication of wavelength-stabilized lasers and a simple variation of the parameters of the gratings on the wafer using optical lithography.
Full Text
Published Version
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call