96 mW longitudinal single mode red-emitting distributed Bragg reflector ridge waveguide laser with tenth order surface gratings

Abstract

Red-emitting ridge waveguide lasers with integrated tenth order surface distributed Bragg reflector gratings were developed. The grating was implemented by the use of a BCl3-Ar-plasma, while the shape of the grating trench was controlled by additional He-backside cooling of the wafer. The devices exhibit longitudinal single mode operation up to 96 mW at 635.3 nm with a side mode suppression ratio of 18 dB and a good beam quality of M2<3. The spectrum is free of mode hops for a span of more than 55 pm.