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Abstract
To realize HF bulk acoustic wave (BAW) devices, we have explored the application of integer multiples of overtones (3rd and 6th) of the thickness extension mode in solidly-mounted resonators (SM-BAWRs). When the average thickness of the acoustic films in the Bragg reflector of the SM-BAW device is wavelength (λ)/4, the fundamental mode is strongly excited, but overtone excitation is weak. However, it was found that 0.035λ–0.075λ acoustic layer thickness of a Bragg reflector was suitable for 3rd overtone excitation using a single LiNbO3 (LN) layer and 0.01λ–0.045λ for 6th overtone excitation using a polarization-flipped double LN layer. By using a 1 μm thick LN single thin layer, we successfully excited 3rd overtone at 9.5 GHz. Furthermore, overtones at 9.5 and 12 GHz were excited by bonding 1 μm and 0.9 μm thick LN plates with different polarities.
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