Abstract
7 Li-ion induced reactions in MeV energy range were studied for light element analysis and depth profiling in solid materials. Analysis of 12C and 16O by (7Li, α) reactions are presented as examples. The reaction cross sections at different angles have been measured in the energy range from 3 to 7 MeV. Due to the high reaction Q-values, the reasonable reaction cross section and other favorable characteristics of the reactions, the α-particles reaction product can be easily detected. Depth resolution and sensitivity of 7Li-induced reactions are discussed for analysis of several light elements simultaneously in detail and compared with RBS. Examples of applications of these reactions to high temperature superconductor thin films are presented.
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