Abstract
The electrically tunable beam deflector have been researched and developed for lots of purpose. For the transmission type beam deflector, an indium‐tin‐oxide (ITO) has been developed with blazed grating patterns. The ITO layer was designed and generated on the lower substrate for transmission type beam deflector. A pixel pitch of ITO grating patterns is 6um, the electrode width is 3um with 3um spacing. With this small pixel pitch, the maximum diffraction angle is 2.541° at a wavelength of 532nm. A minimum cell gap is 2.5um for the enough 2π phase modulation with high birefringence liquid crystal which is delta n, 0.31. Total 720‐ ITO line which was patterned on the lower substrate is controlled individually by driving integrated circuit (IC) from driving module. Beam deflector driving module with driving IC is designed for continuous beam steering. Driving algorithm is developed and applied to the driving system for high angular resolution and continuous beam steering.
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