Abstract
Gallium nitride thick films produced by HVPE having varying levels of defects have been characterized by 69,71Ga and 14N NMR at high field (11.7 T). The highest quality film yields the sharpest NMR peaks, from which highly accurate NMR parameters, viz. nuclear quadrupole coupling constants (NQCC), isotropic chemical shifts and chemical shift anisotropies, could be derived from studies as a function of film orientation. Poorer quality films (larger X-ray rocking curve widths) exhibit markedly broader 71Ga satellite transition peaks with a longer T2 relaxation time, and additional high-frequency shoulders or peaks for the central transitions. The linewidths of the 14N doublet are also broader in the poorer quality films. The 71Ga spectra of films containing high oxygen levels show a new high-frequency central-transition peak with a very short T1. The high-frequency peaks in all cases may be due to Knight shifts arising from conduction electrons. (© 2005 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)
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