Abstract
Various structures of oxide TFT have been developed for the commercialization of high-end displays. Etch stopper structure were applied to both OLED and LCD products considering the uniformity and stability at Gen. 8 line. For larger OLED TV with higher resolution, self-aligned coplanar structure has been developed to minimize parasitic capacitance. Back-channel etched (BCE) structure has been also implemented to improve the display performance and the fabrication cost.
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