Abstract
Recently, impressive progress has been observed in the highly integrated and miniaturized mechanical parts, medical devices and optical communications. As a result micro machining technology has been increasingly required. Though these micro tools have been developed actively, it is also difficult to apply them to micro fabrication fields because of the inherent manufacturing problem. The paper focuses on the development of micro tools by cylindrical grinding with ELID. The micro carbide tools are fabricated as cylindrical, cubical and conical shapes with the dimension less than 30μm and aspect ratio more than 30. With the micro tools on the same machine, characteristics of micro grooving and drilling are evaluated. Also we compare normal micro machining with ultrasonic micro machining on the vibration table. It is confirmed that the developed micro carbide tools are fully applicable to micro grooving, micro drilling and free form cutting
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