Recent Advancement on Ultrasonic Micro Machining (USMM) Process

Abstract

There are a lot of developments in the micro manufacturing methods for the production of the three-dimensional miniaturized products made up of different advanced materials. Ultrasonic micro machining is an essential technique for the fabrication of micro parts on the hard, brittle and non-conductive materials like glass, ceramics and silicon with high aspect ratio. Ultrasonic micro machining is the mechanical type non conventional micro machining process. Material removal mechanism of USMM is similar to macro ultrasonic machining process. Adequate surface finish with stiff tolerances and dimensions can be achieved by ultrasonic micro machining (USMM) on hard and brittle materials. During the last decades, a number of researchers have explored experimentally and theoretically this ultrasonic micro machining (USMM) process technique with different materials. Recent development on ultrasonic micro machining (USMM) process has been highlighted and discussed in details with different types of ultrasonic micro machining (USMM) set up and material removal mechanism. Design and developments of micro-tools for USMM process have also been discussed. Influences of different process parameters on various responses of USMM have been discussed here.