Abstract
This chapter provides an overview of micro electro mechanical systems (MEMS). The sequential steps in their production are then reviewed, namely design, simulation, fabrication, packaging, and testing. The reliability of MEMS is considered from the viewpoint of their performance in actual applications. The applications of micromachined static MEMS, micromechanical MEMS sensors and actuators, and functional MEMS systems are also surveyed. Micro electro mechanical systems are devices that have static or moveable components with some dimensions on the scale of a micrometer to nanometer. MEMS combine microelectronics and micromechanics and sometimes microoptics and micromagnetics. MEMS are already important devices in several major industries. Both the variety of available mechanical microdevices and their applications grow rapidly in the foreseeable future.
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