Abstract
The Mechanical property of free-standing Cu/Al_2O_3 multilayer thin film was investigated by a method of micro-bending test. The Cu and Al_2O_3 monolayer thin film and Cu/Al_2O_3 multilayer thin film were deposited on Si substrate by an electron beam deposition. Free-standing micro-beam specimens were fabricated using a focused ion beam system. The micro-bending tests were conducted using a nanoindenter. Young's moduli of free-standing thin films were estimated by FE analysis including indentation displacement. Young's moduli of Cu and Al_2O_3 films were relatively close to those of bulk material, and that of Cu/Al_2O_3 film with 20 layers was between Cu and Al_2O_3 films. On the other hand, the fracture strength of Cu/Al_2O_3 film with 20 layers was larger than that of Al_2O_3 film.
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