Abstract

A thin polymer film was developed by vapor‐phase deposition method, termed initiated chemical vapor deposition (iCVD) that can replace the inkjet process. The thin polymer film was integrated together with the PECVD SiNx layers to form a high performance thin film encapsulation (TFE) layer for ultra‐high resolution OLEDs, featured by excellent gap‐filling properties, full transparency in whole visible light region, and minimal shadow effect.

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