Abstract

In the paper, the dynamic characteristics of water driven stage is considered by the step response method, theoretically and experimentally. This stage was developed for linear stage of ultra-precision machine tool. The water driven stage has the water hydrostatic bearings and water hydraulic piston. The speed of the stage is, in the static characteristics, proportional to the flowrate supplied to the piston. In order to investigate the dynamic characteristics of the stage, the mathematical model is derived. The water driven stage is modeled by the first order system. The time constant depends on the control conditions. For instance, the time constant becomes 2.5 ms if the flowrate is controlled, whereas it becomes 7.2 s if the supply pressure is controlled. In the experiments, the step input was input to the stage by removing applied constant mass stepwise. The experimental result shows the time constant measured was differed from the calculations, due to undesirable contacts between moving parts.

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