Abstract
For improvement of the performance of sterilization in a tube, it is very important to clarify the discharge processes such as electron avalanche and streamer propagation. We clarified the time and spatial evolution of electron number density, electron temperature and number density of chemical species using computational analysis. The distribution of the oxygen atom depends on electron number density and the ozone generates after increasing of oxygen atoms. The electrons diffuse and charge on the interior surface of the tube after the streamer strikes it.
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