Abstract
The MEMS (Micro-Electronical Mechanical System) scanning mirror is an optical MEMS device that can scan laser beams across one or two dimensions. MEMS scanning mirrors can be applied in a variety of applications, such as laser display, bio-medical imaging and Light Detection and Ranging (LiDAR). These commercial applications have recently created a great demand for low-driving-voltage and low-power MEMS mirrors. However, no reported two-axis MEMS scanning mirror is available for usage in a universal supplying voltage such as 5 V. In this paper, we present an ultra-low voltage driven two-axis MEMS scanning mirror which is 5 V compatible. In order to realize low voltage and low power, a two-axis MEMS scanning mirror with mechanical leverage driven by PZT (Lead zirconate titanate) ceramic is designed, modeled, fabricated and characterized. To further decrease the power of the MEMS scanning mirror, a new method of impedance matching for PZT ceramic driven by a two-frequency mixed signal is established. As experimental results show, this MEMS scanning mirror reaches a two-axis scanning angle of 41.9° × 40.3° at a total driving voltage of 4.2 Vpp and total power of 16 mW. The effective diameter of reflection of the mirror is 2 mm and the operating frequencies of two-axis scanning are 947.51 Hz and 1464.66 Hz, respectively.
Highlights
MEMS scanning mirrors have been used in many applications including confocal microscopy [1,2], biomedical imaging [3,4], head-up displays [5] and Light Detection and Ranging (LiDAR) [6,7,8,9]
A power measurement were monitored by a data acquisition device (NI USB-6216) and the power consumption was circuit was applied to measure the power of the MEMS scanning mirror alone or with calculated by multiplying the effective value of the voltage and the effective value of the current in a the impedance matching circuit
A 5 V compatible two-axis MEMS scanning mirror with a large FOV is presented in this paper for the first time
Summary
MEMS scanning mirrors have been used in many applications including confocal microscopy [1,2], biomedical imaging [3,4], head-up displays [5] and Light Detection and Ranging (LiDAR) [6,7,8,9]. Nowadays, these applications, especially LiDAR for unmanned driving or unmanned aerial vehicle (UAV), have recently created a great demand for low-cost, low-dissipation and low-weighted two-axis. Using the wafer-level vacuum packaging technology, a total driving voltage of 70 V is still needed to actuate a two-axis MEMS scanning mirror for an electrical MEMS scanner with a FOV (Field of view) of 60◦
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