Abstract

We describe a novel pressure sensor, a piezoelectric film gate on an amplifying Thin Film Transistor (TFT), which could detect a multi-level pressure and give a high sensitivity to the force. An organic piezoelectric material, Poly (vinylidene fluoride - trifluoroethylene) (P(VDF-TrFE)), was used to fabricate a transparent and flexible sensor for the touch panel in a future flexible display. It is found that the sensor could detect pressures ranging from 0 to 40kPa, which cover the human touch pressure range, and the current signals of the sensor are different when different pressures are applied on the sensing area. In the pressure testing, although repeated pressures were applied to the sensor up to 100 times, the device showed a very stable output signal.

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