Abstract
CBD grown CdS thin films were implanted using 45 keV N5+ ions of different fluences from 1 × 1015 to 5 × 1016 ions/cm2 by electron cyclotron resonance (ECR) ion source. Structural properties of pristine and ion beam implanted films were studied by glancing angle X-ray diffraction (GAXRD) and it becomes a hexagonal structure of polycrystalline thin films. High resolution scanning electron microscopy (HRSEM) studies shows that the pristine sample forms agglomerated particles of CdS. After ion implantation of higher fluence 5 × 1016 ions/cm2, numerous defects created spikes on the surface of the film. The spike formation explained with the help of nuclear elastic collisions. The optical band gap energy of N5+ ion implanted thin films was reduced with increases of ion fluences. This is probably due to lattice disorder produced band-tailing and/or creation of impurity states. The red, yellow, green and band edge emissions were studied in correspondence with photoluminescence spectrum.
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