Abstract
Nano cluster diamond (NCD) dispersed amorphous hydrogenated carbon (a-C:H) film was formed 440C stainless steel using radio frequency (RF) plasma chemical vapor deposition (CVD) method. For 5-hours coating with the applied bias voltage changed, the formed film became 5 times as thick as that coated for 1 hour. The distribution of NCD in the film's depth was surveyed by the glow discharge optical emission spectrometry profiling. Two strain gauge sensors that put on a thin spherical shell equipped with reciprocal sliding tester detect the difference of the strains in sliding directions. The pin-on-disk test using these sensors was performed to examine the lubricity on the surface.
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