40-channel in-line optical power monitor integrated on 2.5%- silica PLC using out-of-plane micromirror arrays

Abstract

A compact 40-channel in-line optical power monitor was integrated on a 2.5%-Delta silica-based planar lightwave circuit (PLC). Two 20-channel chip-scale-packaged photodiodes were surface-mounted on the PLC, in which out-of-plane micromirror arrays were integrated. A high responsivity of 0.9-1.1 A/W was obtained.