Abstract
The aberration corrected transmission electron microscopy era inspires the development of new research methods. Due to small aberration many of HRTEM applications have become more precise and reliable. The research presented in this paper is devoted to developing a new method for revealing the 3D structure of thin films by focal series processing. We have obtained the sum of the Fourie power spectra in the sliding window of focal series images. Relative defocus value for the minimum of the power spectra is a target function depending on the thin film roughness. For amorphous CoNiP alloy films the new method shows roughness of up to 8 nm for site 65*65 nm in X, Y planes.
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