Abstract
A square 3D-Trench electrode Si detector structure is simulated using a 3D TCAD tool. Electrical characteristics including electrostatic potential, electric field, leakage current, and capacitance have been simulated in detail. It has been found in simulations that both leakage current and the voltage to reach the geometry capacitance (full depletion voltage, Vfd) increase with radiation fluence. The geometry capacitance is 99fF for the standard structure in our study. Detector geometry capacitance׳s dependence on the length and area of the collection column has also been simulated.
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