Abstract
In the case of constructing an inspection system such as extracting the defects of 3-D shape of parts, it is a necessary and indispensable factor that the non-contact shape measurement of an object is automated. However, it is very difficult to measure the shape of an object which has a mirror-like surface. Here, a three-dimensional shape measurement sensor capable of reliably measuring the shape of an object which has mirror-like surface has been developed. The spotlight scanning light-section method is employed in this sensor. The sensor is a compact instrument by which the position of light can scan the object. The output intensity of the light source is controlled according to the detected brightness of light.
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