Abstract
Modern industry and science take novel 3D optical measuring systems and laser technologies with high resolution. For solving their actual problems we have developed the family of the optical measuring systems and technologies. Peculiarities of 3D image formation under partially coherent illumination using constructive calculation method are given. The optical methods and system for 3D dimensional inspection of ceramic parts are presented. The performances of 3D super resolution optical low-coherent micro-/nanoprofilometer are given. Using atomic perfectly-smooth mirror as a reference object, the breakthrough in-depth measurement with 20 picometers was achieved. The newest results in the field of laser technologies for high-precision synthesis of microstructures by updated image generator using the semiconductor laser are presented. The measuring systems and the laser image generator have been tested by the customers and are used in different branches of industry and science.
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