Abstract
This study is intended to fabricate 3D microstructures on single crystal silicon by tribo-nano-lithography (TNL) and wet chemical etching. The processed area of single crystal silicon by diamond tip withstands etching in KOH solution, and consequently protruding microstructure can be fabricated. Transmission electron microscope (TEM), Auger electron spectroscopy (AES) and secondary ion mass spectrometry (SIMS) analyses are utilized to study the mechanism of masking effect. As a result, it can be known that crystal silicon structures are converted to amorphous silicon by TNL process, resulting in acting to the etch mask against KOH solution. Comparison of etch rate between amorphous and single crystal silicon is conducted. In addition, mechanism of protuberance, which is generated in processing under lower normal load, is studied with minute observation of processed area.
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