Abstract
A thin-film pressure sensor for measuring oil-film pressure in piston pin boss of automobile engine has been developed. The manufacturing method and the structure were improved than those of sensors for bearing metals. The sensor is about 6∿7 micro-meters in thickness and consist of aluminum oxide film, aluminum nitride film and Cu-Mn-Ni alloy for pressure detective film. As for a problem on pin holes created in isolation layers of AIN and Al_2O_3 by reactive spattering, alternation of sputtering gas volume and the number of ultrasonic washing were available for reducing the dust creation and they caused high isolation resistance layers. The number of times of annealing for new developed sensors applying AIN and Al_2O_3 made it possible to reduce the both of temperature and pressure characteristics change of sensors. This paper is represented the manufacturing method, the structure and the sensor characteristics of the sensor.
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