Abstract

In this chapter, we introduce a sensing technology based on nanomechanical principle: the Membrane-type Surface stress Sensor (MSS). The MSS was developed as an optimized nanomechanical sensing platform for the so-called static mode operation without oscillation. While the overall sensitivity and selectivity of the MSS depend on the receptor materials coated on a center membrane, the advanced basic features including high sensitivity, versatility, compactness, quick response, mechanical/electrical/thermal stability, low power consumption, and easy handling make this technology suitable for practical applications. We describe here the basic principles of the sensor and some receptor materials that were used in different applications including the food and biomedical industry.

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