3-D Vision Feedback for Nanohandling Monitoring in a Scanning Electron Microscope

Abstract

In this article, a new 3-D imaging system for 3-D vision feedback for nanohandling in a scanning electron microscope (SEM) is presented. The stereo images are generated by beam tilting followed by the processing of the image data. Additionally, the 3-D module consisting of a vergence and a stereo system is described in more detail. The proposed stereo algorithm is biologically motivated and utilizes a new coherence detection analysis algorithm. The 3-D imaging system provides a sharp and high density disparity map, and 3-D plots in sub-pixel accuracy. The system is therefore suitable for micro- and nanohandling in SEMs.