Abstract
We demonstrate encoding the surface texture using a MEMS-based tactile actuators array. This array is composed of nine piezoelectric actuators and a hydraulic displacement amplification mechanism. It can be applied to a tactile sensor to encode the surface texture into signals. In this work, we prepared micro patterned tactile samples made of Su-8. They have micro stripped patterns on their surface. We only changed the pitch and width of the stripes to control their surface roughness. The experimental result indicate that this tactile sensor enable us to encode the surface texture in the pitch and width range from 200 μm to 900 μm.
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