Abstract
We have developed a hydraulic displacement amplification mechanism (HDAM) and studied its dynamic response when combined with a piezoelectric actuator. The HDAM consists of an incompressible fluid sealed in a microcavity by two largely deformable polydimethylsiloxane (PDMS) membranes. The geometry with input and output surfaces having different cross-sectional areas creates amplification. By combining the HDAM with micro-actuators, we can amplify the input displacement generated by the actuators, which is useful for applications requiring large deformation, such as tactile displays. We achieved a mechanism offering up to 18-fold displacement amplification for static actuation and 12-fold for 55 Hz dynamic actuation.
Highlights
Microelectromechanical systems (MEMS) technology has proven its abilities for providing miniaturized, integrated, fast responding and energy-saving devices
Because information transmission by tactile receptors is highly dependent on stimulus frequency we have to determine the factors influencing the dynamic characteristics of this large displacement actuator system
We describe the characteristics of an optimized hydraulic displacement amplification mechanism (HDAM) consisting of a microchamber etched in a titanium wafer and filled with glycerin sealed by deformable thin PDMS membranes
Summary
Microelectromechanical systems (MEMS) technology has proven its abilities for providing miniaturized, integrated, fast responding and energy-saving devices. These qualities can be combined to develop tactile displays, an emerging human interface application, which artificially produces tactile. Tactile displays are being developed to offer a new human-machine interface approach for virtual reality applications and interaction devices such as mice or games controllers and to supporting visually impaired persons. They consist of micro-actuator arrays that mechanically stimulate skin receptors to deliver tactile information. Because information transmission by tactile receptors is highly dependent on stimulus frequency we have to determine the factors influencing the dynamic characteristics of this large displacement actuator system
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