Abstract
This paper describes the fatigue characteristics of Chemical Vapor Deposition diamond films on a silicon substrate. Repeated indentation load was applied to the diamond film surface with a spherical indenter to introduce mechanical fatigue damage in the films and interfaces with a minimum amount of tribological surface damage. The stress field applied to the sample is analyzed in detail, and fatigue behavior was clarified as an S-N diagram. Detailed observation of fatigue damage revealed that damage initiated on the substrate surface leading to interface debonding.
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