25 W of average power at 172 nm in the vacuum ultraviolet from flat, efficient lamps driven by interlaced arrays of microcavity plasmas

S.-J Park,A E Mironov,J G Eden,C M Herring,J H Cho

doi:10.1063/1.4976530

S.-J Park, A E Mironov + Show 3 more

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https://doi.org/10.1063/1.4976530

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Abstract

More than 25 W of average power and >800 W of peak power have been generated at λ=172 nm (hν=7.2 eV) in the vacuum ultraviolet (VUV) from the Xe2 molecule in flat, 10 × 10 cm2 lamps having an active area and volume of 80 cm2 and 20%. For a bipolar voltage waveform driving frequency of 137 kHz and a 54% Xe/Ne gas fill mixture at a 300 K pressure of 550 Torr, the lamp generates as much as 31.5 W of average power and intensities >350 mW cm−2 in 40–60 μJ, 70±10 ns FWHM pulses produced in a burst mode−four pulses of 600–850 W peak power in every cycle of the driving waveform. The lamp intensity is uniform to within ±2.5% at ≥10 mm from its surface and average power varies linearly with pulse repetition frequency throughout the 18−135 kHz interval. The spectral breadth of the Xe dim...

Highlights

25 W of average power at 172 nm in the vacuum ultraviolet from flat, efficient lamps driven by interlaced arrays of microcavity plasmas
Few sources of radiation having an average power ≥1 W currently exist in the vacuum ultraviolet (VUV) and deep-UV regions of the spectrum (100–250 nm)
The Xe2 molecular lamp (λ = 172 nm) is the most efficient emitter available in the VUV, intensities generated by commercially-available lamps are generally restricted to 30–50 mW cm2, and their cylindrical geometry is not amenable to the spatially uniform irradiance of a surface.[4,5,6,7,8]