Abstract

We are studying a two-axis micro-actuator to enhance the presentation reality of a tactile display that is capable of presenting pressure distribution and shearing force. The actuator is composed of sequentially connected x- and y-directional actuators ; each actuator is comprised of bimorph piezoelectric actuators. The x- and y-directional actuators are independently controlled by changing the applied voltage to position a probe that is attached to the tip of a two-axial actuator. The maximum displacement and force generated by the x-directional actuator are 1.1mm and 0.03N, respectively. Those generated by y-directional actuator are 1.0mm and 0.06N, respectively. Since relationship between applied voltage and displacement caused by the voltage shows a hysteresis loop in the bimorph actuator used as components of the two-axis actuator, we produce a control system for the two-axial actuator based on a multi-layered artificial neural network to compensate the hysteresis.

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