Abstract
A new fabrication process of a metal nano-dot array by the templated thermal dewetting process is developed in this paper. This process comprises 3 steps; the thin Au film deposition on a quartz glass substrate, the nano imprint by using the plastic mold on the Au film, and self-organization of a nano dot array by the thermal dewetting process. In this propose, self-organization of nano dot array on a groove patterned substrate is investigated. Effect of groove patterned on the dot morphology and arrangement are studied experimentally. The results show that the polymer film mold transfer grooves pattern on the surface of workpieces and it is show that grooves by this process is effective to control nano dot array generation in its thermal annealing process. It is confirmed that a nano dot array of good arrangement can be fabricated by the templated thermal dewetting method.
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