Abstract
21422 SOIを用いた熱膜式マイクロせん断応力センサの開発(MEMS,OS.1 機械工学が支援する微細加工技術(半導体・MEMS・NEMS),学術講演)
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https://doi.org/10.1299/jsmekanto.2008.14.423
Copy DOIPublication Date: Jan 1, 2008 |
21422 SOIを用いた熱膜式マイクロせん断応力センサの開発(MEMS,OS.1 機械工学が支援する微細加工技術(半導体・MEMS・NEMS),学術講演)
Join us for a 30 min session where you can share your feedback and ask us any queries you have
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