Abstract
Microvibration control technology has been rapidly becoming important in a number of fields including superfine technology in semiconductor manufacturing and microgravity research experiments in space. In this paper, an active 6DOF microvibration testing device using air actuators is studied from the view point of control system design. The control system proposed in this paper consists of 3 control functions: a dual model matching controller, an on-line feedforward controller using disturbance information, and a multi axis off-line feedforward controller to generate a modified reference input using experimental data. The effectiveness of the proposed control system is verified through reference following experiments when adevice for vibration test in equiped on the table.
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