2×2 InGaAsP/InP laser amplifier gate switcharrays using reactive ion etching

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Waveguide integrated 2×2 InGaAsP laser amplifier gate switch arrays were fabricated using MOVPE and RIE. For the first time, RIE was applied as an etching process for the butt-coupling of the amplifier and the waveguide. A very low fibre-to-fibre loss of 1.2 dB was obtained, and the on/off extinction ratio exceeded 42 dB.

CitationsShowing 9 of 9 papers
  • Research Article
  • Cite Count Icon 1
  • 10.1016/j.jcrysgro.2004.12.025
Growth characteristics of InP in bridged mask growth using organo-metallic vapor phase epitaxy
  • Jan 22, 2005
  • Journal of Crystal Growth
  • J.S Kim + 2 more

Growth characteristics of InP in bridged mask growth using organo-metallic vapor phase epitaxy

  • Research Article
  • 10.1143/jjap.44.l179
Bridge Mask Growth Using Organomtallic Vapor Phase Epitaxy
  • Jan 1, 2005
  • Japanese Journal of Applied Physics
  • Jeong Soo Kim + 2 more

For the area-dependent epitaxial growth, we propose a new epitaxial growth technique named the bridge mask growth. In this method, growth characteristics are controlled by spatial dimensions such as SiNx bridge width and the gap distance between SiNx bridges. We have successfully achieved a reduction in the growth rate and an energy band gap shift in multi-quantum-well structure using this technique.

  • Research Article
  • Cite Count Icon 4
  • 10.1088/0268-1242/13/10/024
Fabrication of a high-performance InGaAsP/InP integrated laser with butt-coupled passive waveguides utilizing reactive ion etching
  • Oct 1, 1998
  • Semiconductor Science and Technology
  • Joo-Heon Ahn + 7 more

We obtained high-performance InGaAsP/InP buried heterostructure lasers integrated with butt-coupled waveguides using reactive ion etching (RIE) for mesa definition, brief chemical cleaning for damage relief and low-pressure metalorganic vapour phase epitaxy for the epitaxial layer growth. We measured a coupling efficiency between the active layer and the passive waveguide layer of over per facet across a quarter of a 2 inch InP wafer. The threshold current and the slope efficiency were 13 mA and , respectively, of the long integrated laser. This excellent uniformity and high performance demonstrate that RIE coupled with slight chemical treatments can be successfully used to fabricate high-quality integrated photonic devices. Transmission electron microscopy observation revealed RIE-induced strains and dislocation loops around the etched mesa after the regrowth, which were proposed to be responsible for the inferior characteristics of the lasers with mesas that were reactive ion etched but had not been cleaned in HBr-based solution.

  • Research Article
  • Cite Count Icon 1
  • 10.1143/jjap.38.l320
Fabrication of 1×4 Optical Switch with Gain Using Dual InGaAsP/InP Laser Diode Amplifier
  • Mar 1, 1999
  • Japanese Journal of Applied Physics
  • Sang Min Lee + 6 more

The fabrication and characterization of a 1×4 optical switch module are described. The switch consists of one pre-amplifier and four gate-amplifiers which are monolithically integrated with passive waveguides and splitters. We obtained very uniform characteristics for each path. The average values of fiber-to-fiber gains and extinction ratios were 7.4 dB and 54 dB, respectively, for TE polarized light at 50 mA gate current and 30 mA pre-amplifier current.

  • Conference Article
  • 10.1109/ectc.1998.678834
Hybrid optical switch using polymer waveguides and semiconductor optical amplifiers (SOAs)
  • May 25, 1998
  • R Fan + 1 more

Optical switching can be performed by using optical amplifiers combined with a passive waveguiding network. Recently, most of the effort in optical amplifier switch modules has been focused on monolithic switches in which the entire device is fabricated on an InP substrate together with the semiconductor optical amplifiers (SOAs). In this paper, we investigate the use of SOAs with passive polymer waveguides to make hybrid switches of varying sizes. The optical amplifiers serve a dual purpose. The SOAs are used in order to gate the signal and amplify the signal in order to offset the losses associated with the passive waveguide elements as well as the losses from component misalignments in the switch module. Our analysis finds the largest switch module size that can be made with the architecture used. We also calculate the maximum number of switch modules which can be cascaded in order to retain a bit error rate (BER) under 10/sup -9/.

  • Research Article
  • Cite Count Icon 15
  • 10.1109/6040.883757
Fabrication of semiconductor optical switch module using laser welding technique
  • Jan 1, 2000
  • IEEE Transactions on Advanced Packaging
  • Donghan Lee + 8 more

The 4/spl times/4, 1/spl times/2, and 1/spl times/4 semiconductor optic-switch modules for 1550 nm optical communication systems were fabricated by using the laser welding technique based on the 30-pin butterfly package. For better coupling efficiency between a switch chip and an optical fiber, tapered fibers of 10-15 /spl mu/m lens radius were used to provide the coupling efficiency up to 60%. The lens to lens distance of the assembled tapered fiber array was controlled within /spl plusmn/1.0 /spl mu/m. A laser hammering technique was introduced to adjust the radial shift, which was critical to obtain comparable optical coupling efficiencies from all the channels at the same time. The fabricated optical switch modules showed good thermal stability, with less than 5% degradation after a 200 thermal cycling. The transmission characteristics of the 4/spl times/4 switch module showed good sensitivities, providing error free transmissions below -30 dBm for all the switching paths. The dynamic ranges for the 4/spl times/4 and 1/spl times/2 switch modules were about 8 dB for a 3 dB penalty and about 17 dB for a 2 dB penalty, respectively.

  • Research Article
  • Cite Count Icon 26
  • 10.1109/68.701511
Monolithic integration of a quantum-well laser and an optical amplifier using an asymmetric twin-waveguide structure
  • Aug 1, 1998
  • IEEE Photonics Technology Letters
  • P.V Studenkov + 3 more

We demonstrate the monolithic integration of a 1.55 μm wavelength InGaAsP-InP multiple-quantum-well (MQW) laser and a traveling-wave optical amplifier using an asymmetric, vertical twin-waveguide structure. The laser and amplifier share the same strained InGaAsP MQW active layer grown by gas-source molecular beam epitaxy, while the underlying passive waveguide layer is used for on-chip optical interconnections between the active devices. The asymmetric twin-waveguide structure uses the difference in modal gains to discriminate between the even and odd modes.

  • Conference Article
  • 10.1109/leos.1997.645353
Fabrication of multi-channel tapered optical fiber array package using laser welding technique
  • Nov 10, 1997
  • S.C Kang + 8 more

As optical transmission capacity increases, the application of multi-fiber array technology is becoming more popular in many areas. Tapered fiber array is used to compensate the mode-field diameter mismatch of a device resulting in high optical coupling efficiency. As the radius of a fiber tip decreases, optical coupling efficiency increases with the trade-off of optical alignment tolerance. Therefore, for higher optical coupling efficiency, more accurate alignment processes between the components and reliable assembly methods are necessary. Compared with soldering or the epoxy bonding technique, the laser welding technique is well known as a reliable fixing method for optical component packages. However, careful design of welding components for fixing tapered fiber array is required to obtain low post weld shift. In this study, the effect of laser welding processes on the optical misalignment of the arrayed fibers is investigated using semiconductor optical switch devices.

  • Research Article
  • Cite Count Icon 8
  • 10.1109/50.838129
Hybrid optical switch using passive polymer waveguides and semiconductor optical amplifiers
  • Apr 1, 2000
  • Journal of Lightwave Technology
  • R.S Fan + 1 more

Optical switching can be performed by using optical amplifiers combined with a passive waveguiding network. Recently, most of the effort in optical amplifier switch modules have been focused on monolithic switches in which the entire device is fabricated on an InP substrate together with the semiconductor optical amplifiers (SOA's). In this paper, we investigate the use of SOA's with passive polymer waveguides to make hybrid switches of varying sizes. The optical amplifiers serve dual purposes, gating the signal and amplifying the signal. Amplification is needed in order to offset the losses associated with the passive waveguide elements as well as the losses from component misalignments in the switch module. Our analysis finds the largest switch module size that can be made with the architecture used. We also calculate the maximum number of switch modules which can be cascaded in order to retain a bit-error rate (BER) under 10/sup -9/.

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  • Research Article
  • Cite Count Icon 130
  • 10.1049/el:19921428
Monolithically integrated 4×4 InGaAsP/InP laser amplifier gate switch arrays
  • Nov 19, 1992
  • Electronics Letters
  • M Gustavsson + 7 more

Monolithically integrated 4×4 semiconductor laser amplifier gate switch arrays comprising 24 integrated laser amplifiers have been fabricated and evaluated. Net positive optical gain between fibres, high extinction ratio, and low crosstalk are reported.

  • Conference Article
  • Cite Count Icon 18
  • 10.1364/oaa.1992.pd9
Monoilthically Integrated 4×4 InGaAsP/InP Laser Amplifier Gate Switch Arrays
  • Jan 1, 1992
  • Mats Gustavsson + 7 more

Monolithically integrated 4×4 semiconductor laser amplifier gate switch arrays comprising twenty-four integrated laser amplifiers have been fabricated and evaluated. We report observation of net positive optical gain between fibres, high extinction ratio, and low crosstalk.

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  • 10.1049/el:19920490
Monolithically integrated 2×2 InGaAsP/InP laser amplifier gate switch arrays
  • Apr 9, 1992
  • Electronics Letters
  • M Janson + 6 more

Monolithically integrated 2*2 semiconductor laser amplifier gate switch arrays have been fabricated and evaluated. Net positive chip gain, high extinction ratio, and high electrical isolation between the integrated laser amplifiers are reported.

  • Research Article
  • Cite Count Icon 51
  • 10.1109/68.473475
Polarization-insensitive, monolithic 4 x 4 InGaAsP-InP laser amplifier gate switch matrix
  • Nov 1, 1995
  • IEEE Photonics Technology Letters
  • W Van Berlo + 7 more

Monolithically integrated 4/spl times/4 semiconductor laser amplifier gate switch arrays comprising twenty-four integrated laser amplifiers have been designed, fabricated, and evaluated. Low fiber-to-fiber loss, low polarization dependence, high extinction ratio, and low crosstalk are reported. >

  • Conference Article
  • 10.1109/leos.1995.484804
Monolithically integrated 2×2 InGaAsP/InP laser amplifier gate switch arrays using RIE and MOVPE
  • Oct 30, 1995
  • Kwang Ryong Oh + 5 more

Summary form only given. The switch arrays operating at 1.3 /spl mu/m wavelength are fabricated integrating passive and active InGaAsP-InP semiconductor waveguides by a stable fabrication process based on metal organic vapor phase epitaxy (MOVPE) and reactive ion etching (RIE). After 1st growth of active layers and RIE etching of passive parts, the passive layers were grown for butt-coupling. The passive and active waveguides were prepared by RIE process. We also achieved the integrated amplifiers with the high performance and good uniformity by the same fabrication method.

  • Research Article
  • Cite Count Icon 19
  • 10.1109/3.234465
Monolithic InGaAsP-InP laser amplifier gate switch matrix
  • Jun 1, 1993
  • IEEE Journal of Quantum Electronics
  • J.D Burton + 3 more

An InGaAsP-InP 2*2 laser amplifier gate switch matrix operating at 1.5 mu m with a fiber-to-fiber insertion loss of 3 dB is reported. The switch consists of passive waveguides for branching and recombining, monolithically integrated with laser amplifiers. The passive waveguides perform the signal routing, and the amplifiers provide gain/absorption in each path for on/off switching, achieving gain in the on state to compensate the losses. Dry-etched total internal reflection mirrors are employed as 90 degrees waveguide corner mirrors and also incorporated in the splitters in order to give a compact design. The on/off extinction ratio is >45 dB and the crosstalk is <-45 dB.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">&gt;</ETX>

  • Conference Article
  • 10.1109/cleopr.1999.814674
Optical devices integrated with semiconductor optical amplifier
  • Aug 30, 1999
  • Kwang Ryong Oh + 3 more

Semiconductor optical amplifiers have been used as key optical components for high capacity communication systems. Monolithic integration is necessary for the stable operation of these devices and for wider applications. In this paper, the coupling technique between different waveguides was discussed and research results about optical devices integrated with SOAs were presented. In particular laser amplifier gate switch arrays have been discussed.

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  • Cite Count Icon 9
  • 10.1364/ao.53.006698
Thermo-optic waveguide gate switch arrays based on direct UV-written highly fluorinated low-loss photopolymer.
  • Oct 2, 2014
  • Applied optics
  • Xiaoyan Niu + 9 more

Novel thermo-optic waveguide gate switch arrays were designed and fabricated based on the direct UV-written technique. Highly fluorinated low-loss photopolymers and organic-inorganic grafting materials were used as the waveguide core and cladding, respectively. The low absorption loss characteristics and excellent thermal stabilities of the core and cladding materials were obtained. The rectangular waveguides and arrayed electrode heaters have been theoretically designed and numerically simulated to realize single-mode transmission. The propagation loss of a 4-μm-wide straight waveguide was measured as 0.15 dB/cm. The insertion loss of the device was directly measured to be about 5.5 dB. The rise and fall times of the device applied 100 Hz square-wave voltage were obtained as 1.068 and 1.245 ms, respectively. The switching power was about 9.2 mW, and the extinction ratio was 17.8 dB. The low-loss integrated switch arrays are suitable for realizing large-scale photonic integrated circuits.

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Digital transmission experiment with monolithic 4 × 4 InGaAsp/InP laser amplifier gate switch array
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  • Electronics Letters
  • M Gustavsson + 2 more

Digital transmission experiments at 2.488 Gbit/s involving a monolithic 4 × 4 semiconductor laser amplifier gate switch array operating at around 0 dB fibre-to-fibre gain have been performed. Receiver power penalties less than 1 dB are reported for a switch input power range in excess of 10 dB. Results on switch saturation include a switch signal output power, coupled to the output fibre, of – 5 dBm for 3 dB gain compression of the 4 × 4 switch.

  • Book Chapter
  • Cite Count Icon 1
  • 10.1016/b978-012225262-4/50008-8
Chapter 6 - PLC-type Thermooptic Switches for Photonic Networks
  • Jan 1, 2003
  • WDM Technologies: Passive Optical Components
  • Yoshinori Hibino

Chapter 6 - PLC-type Thermooptic Switches for Photonic Networks

  • Conference Article
  • 10.1364/oam.1990.fnn2
Optical Bistability in a MQW Etalon with Optical Half-wave Periodicity
  • Jan 1, 1990
  • Donald L Mcdaniel + 1 more

Optical bistability (OB) in passive nonlinear etalons such as those containing multiple quantum wells (MQW) of GaAs/AlGaAs is a promising alternative to other bistable optical switching mechanisms such as those which occur in semiconductor lasers and laser amplifiers [1]. Although OB in passive nonlinear etalons is somewhat slower, it is much more easily extendable to one- and two-dimensional arrays of switches. To realize this advantage, it is necessary to minimize the switching thresholds and optical absorption (and hence the power dissipation) in the MQW etalon. Following an approach which has already proven successful in reducing thresholds and increasing power efficiencies of vertical-cavity surface-emitting semiconductor lasers (VCSELs) [2], here we consider a MQW structure with several quantum wells (or closely-spaced groups of quantum wells) spaced one-half wavelength apart in the resonant cavity, positioned so that they align optimally with the antinodes of the standing wave optical field in the etalon. We have analyzed the system numerically using a wave propagation model in a thin-film matrix formalism. The spacers are assumed to have constant indices, the unsaturated QW absorption α0 follows the semi-empirical description of Chemla et al. [3], and the excitonic features saturate according to the simple rule α(I) = α0/(1 + I/Isat). In contrast to the situation where optically-pumped lasing occurs, here the spacers are non-absorbing and the input optical beam(s) for holding and switching are tuned close to the heavy-hole excitonic absorption peak in the quantum wells. As in the VCSEL, significant excitation of the quantum wells occurs primarily along the cavity axis, reducing the switching threshold. This reduction, together with the low background absorption of the structure, should enable efficient arrays of bistable optical switches to be constructed.

  • Conference Article
  • Cite Count Icon 2
  • 10.1109/ofc.1998.657224
Wavelength-division add/drop multiplexer using a single wavelength-filter and back-reflector switches
  • Feb 22, 1998
  • H Shimomura + 2 more

Summary form only given. The increase of the channels in wavelength-division multiplexing (WDM) in optical systems will make possible reconfigurable and transparent WDM networks, such as ring networks with wavelength-division add-drop multiplexer (WD-ADM). The most crucial issue for the WD-ADM system is the limitation of the cascaded-node count caused by passband-frequency misalignment of wavelength multiplexers/demultiplexers. For example, cascadability performance of an arrayed waveguide grating (AWG) spaced at 100-GHz interval is practically limited to several spans. In this paper, we propose a novel WD-ADM configuration using a single AWG and back-reflecting-type Er/sup 3+/-doped fiber amplifier (EDFA) gate switches, which improves the allowable cascaded-node count. The feasibility of the proposed WD-ADM configuration has been confirmed through experiments, and the cascadability of nodes has been estimated.

  • Research Article
  • Cite Count Icon 13
  • 10.1109/jlt.2019.2952384
All-Optical Switching and Multiple Logic Gates Based on Hybrid Square–Rectangular Laser
  • Mar 15, 2020
  • Journal of Lightwave Technology
  • Jia-Chen Liu + 6 more

All-optical switching and multiple logic gates are experimentally demonstrated using AlGaInAs/InP hybrid square-rectangular lasers. Controllable bistability induced by saturable absorption in the square microcavity is achieved around the threshold with the square cavity in an open circuit state. Based on the bistability, all-optical switching operation is realized by injecting set/reset optical signals with the wavelengths around the lasing mode of 1529.9 nm and another high-Q mode at 1560 nm. Furthermore, mode competitions between three resonant modes around 1541 nm with an interval of 1.2 nm are used to realize all-optical multiple logic gates of NOT, NOR, and NAND functions under low-power optical pulses, with injecting currents to the square and rectangular sections. The static extinction ratio of 34, 40 and 24 dB are obtained for NOT, NOR, and NAND gates, respectively, and the dynamic extinction ratio over 10 dB of NOT function at 15 Gb/s, NOR and NAND functions at 2 Gb/s are demonstrated. With the merits of multifunctional operations, large optical injection wavelength tolerant ranges, low power consumption, small footprint and suitability for on-chip integration, the device offers a potential solution for all-optical signal processing in photonic integration circuits.

  • Conference Article
  • Cite Count Icon 5
  • 10.1109/islc.1992.763605
Low loss monolithic 2 x 2 laser amplifier gate switch matrix
  • Sep 21, 1992
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We report a compact integrated 2.x2 laser amplifier gate switch matrix with 4dB fibre-to-fibre loss. Total internal re .flection mirrors are incorporated to achieve a small, low loss device suitable for large scale integration.

  • Research Article
  • Cite Count Icon 6
  • 10.1143/jjap.43.l18
Monolithically Integrated 4×4 InGaAsP/InP Laser Amplifier Gate Switch Matrix Based on Buried Ridge Stripe Waveguides
  • Dec 19, 2003
  • Japanese Journal of Applied Physics
  • Jung-Ho Song + 4 more

A 4×4 semiconductor optical amplifier gate switch matrix was fabricated by integrating undoped upper-cladded waveguides with buried ridge stripe semiconductor optical amplifiers. The undoped upper cladding was used to prevent the high propagation loss of the conventional p-cladded waveguides. The 4×4 switch showed positive fiber-to-fiber gain with only two integrated optical amplifiers per transmission path and all sixteen transmission paths showed uniform characteristics.

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