1804 EHDマイクロポンプにおける電極の非対称性と流路高さの影響(OS18-2 ナノ・マイクロ流体のダイナミクス,オーガナイズドセッション)

Abstract

The effect of asymmetry in the electrode geometry and channel height on the performance of electrohydrodynamic(EHD) micropumps was studied. The micropumps consisted of two glass substrate on which chromium/gold planar electrodes were designed. The pumps were tested using HFE-7100 as the working fluid. The micropumps with an asymmetric-electrode design, where the emitter and collector electrode widths were different, generated a lower pressure head than the corresponding micropumps with symmetric-electrode designs for same applied voltage. The micropumps with a channel height of 100 μm generated a higher pressure head than the corresponding micropumps with 50 μm and 150 μm channel height for same electric field. It was found that maximum static pressure was generated with the symmetric-electrode design and the channel height of 100 μm.