Abstract
This chapter discusses how to fabricate micro-electromechanical systems and nano-electromechanical systems (MEMS/NEMS) sensors with silicon-on-insulator (SOI) technologies. The chapter first reviews the operating principles of MEMS/NEMS sensors and how SOI wafers can help to simplify sensor design and manufacturing of the MEMS/NEMS. The chapter then discusses the design of sensor devices with detailed processing technologies, and provides some examples of the process flows for mass production of MEMS/NEMS sensors.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.