Abstract
Water driven stage, which is composed of water hydrostatic bearings and water hydraulic piston mechanism, was developed for linear stage of ultra-precision machine tool. In order to obtain fine diamond turned surfaces, a constant feed motion of the stage is needed t0 obtain fine and smooth finishing surfaces. In this paper, mathematical models of the stage and the valve are discussed, and the controlled system is indicated as second order system. The PI speed control system of the stage is then designed based on the characteristics of the stage and the valve. The performances of the designed feedback control system are tested by experiments. The steady state error of about 1% was obtained. Dynamic characteristics are investigated by the step response method. When the desired speeds were changed from 0.5 mm/s t0 0.6 mm/s, the 5% settling time was measured approximately to be 1.8s and no overshoot was obtained.
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