(111)-oriented Pb(Zr,Ti)O3 films deposited on SrRuO3∕Pt electrodes: Reproducible preparation by metal organic chemical vapor deposition, top electrode influence, and reliability

Abstract

(111)-textured Pb(Zr0.4Ti0.6)O3 films (thickness of ∼120nm) were deposited on (111)-oriented SrRuO3 bottom electrodes by pulse metal organic chemical vapor deposition (MOCVD). PZT single phase was evidenced over a large range of Pb precursor input rate into the MOCVD chamber. In this process window, the good control of the (111) texture of PZT films was confirmed. It is shown that the control of both the composition and orientation of PZT films leads to reproducible electric properties (Pr, Vc, resistance to fatigue) across the process window. Furthermore, the impact of the top electrode chemical nature, elaboration process, and annealing process upon the electric properties was studied systematically.