111 超精密マザーマシンの開発(OS9 環境適応形加工)

Abstract

Generally, in manufacturing of various parts of an ultraprecision machine tool, accuracy of a mother machine is not enough and tedious correction by scraping is indispensable. The purpose of this study is to investigate a possibility to design an ultraprecision mother machine which can produce machine parts of an ultraprecision machine tool. In this study, to obtain a higher accuracy independent of bed thickness or work size, active mounts are newly employed which can support the bed foot by push up or pull down forces and actively control the deformation of bed while the table traverses. From the results of simulations, it has been found that the active mounts are effective to improve the machining accuracy.