Abstract
The behavior of rewetting on high superheated surface, focusing on rewetting temperature during collapse of saturated film boiling was investigated experimentally. In this report, a surface temperature sensor was developed by using technology of Micro Electro Mechanical Systems (MEMS). A special temperature sensor, i.e., a thin film type thermocouple, was fabricated by using MEMS technology, such as photolithography, sputtering and etching. The special temperature sensor was able to measure instantaneous and local temperature on a surface of mini-channel in loop type micro heat pipe.
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