Abstract
In this chapter we discuss organic layers for optical layer systems. Thanks to their higher mechanical flexibility, new applications like optical layer systems on deformable substrates or transparent bendable diffusion barriers on polymer foils are becoming possible. Due to properties such as complex molecular structure and higher sensitivity against heat or radiation, the preparation of organic thin films differs from the deposition techniques of oxide thin films. Therefore we describe different vapor deposition techniques for organic thin films such as thermal evaporation, sputter deposition, plasma enhanced chemical vapor deposition and thermal activated chemical vapor deposition. Finally, we discuss the possibility of composite thin films which combine properties of organic and oxide materials like high refractive index and high mechanical flexibility.
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