Abstract
AbstractWe have developed 10‐inch 300PPI and 65‐inch ultra high‐definition FFS LCD using amorphous In‐Ga‐Zn‐O(IGZO) TFT. After improvement of TFT's process and structure, the TFT performance is good enough for TFT‐LCD. In this report, we discuss our IGZO TFT process, uniformity and reliability.
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