Abstract
This chapter presents an introduction to radio frequency microelectromechanical systems (RF MEMS) technologies for wireless applications. It starts with reviewing the operation principle and common realizations of electrostatically actuated components. It is shown that RF MEMS advantages materialize especially at higher frequencies, and for applications requiring high linearity. The chapter then moves on to present exemplary RF MEMS applications. It is pointed out that while RF MEMS components have few opportunities as a one-on-one replacement for existing switch technologies, they are extremely attractive in RF MEMS-only subsystems. Besides, emerging monolithic BiCMOS-RF MEMS integration opens up new opportunities for millimeter-wave integrated circuits (ICs).
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